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Pulsed Laser Deposition of Amorphous Diamond-like Carbon Films with ArF (193 nm) Excimer Laser at Room Temperature

Xiong F, Wang Y, Leppert V, Chang R. Pulsed Laser Deposition of Amorphous Diamond-like Carbon Films with ArF (193 nm) Excimer Laser at Room Temperature. J. Mater. Res. 1993;(8):2265.
Last updated on 07/22/2022